I 101 is equipped with two pairs of cathodes 5 ² x 23 ², designed for high speed of deposition,
assembled vertically face to face in pairs. Two cathodes are placed inside the chamber, suspended
from the top, and two exterior cathodes are adjusted laterally in the chamber's wall. The original
conception of the fixation flanges insures rapid and easy removing of the cathodes, rapid exchange
of the targets, and adjustment of the distance cathode - substrates.
It is also possible to fit different sizes of cathodes as well as one additional pair of cathodes.
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