Gas mixture is uniformly spread on the circumference of the reactive deposition cathodes.
The machine is, in its original state, equipped with three entries of different gases with
Mass Flow Control by means of HITECH flowmeters. On request, a fourth entry can be provided.
| Entry 1: | argon | 0 - 500 sccm |
| Entry 2: | reactive gas | 0 - 200 sccm (nitrogen calibrated) |
| Entry 3: | reactive gas | 0 - 100 sccm (nitrogen calibrated) |
| Entry 4: | optional |
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